Plasma-Therm Advanced Plasma Processing Equipment

Plasma-Therm is an established leading provider of advanced plasma processing equipment for the semiconductor industry and related specialty markets. Our plasma etch and thin film deposition systems are used both in research and development and high-volume production applications for solid state lighting, wireless, MEMS, data storage, renewable energy, nanotechnology, photomask and photonics.

Advanced plasma processing systems for device fabrication

Our systems, which include inductively coupled plasma (ICP), reactive ion etching (RIE), deep silicon etching (DSE), plasma enhanced chemical vapour deposition (PECVD) and high-density plasma chemical vapour deposition (HDPCVD), provide critical process steps in the fabrication of devices found in these markets.

The flexibility and modularity of our flagship product, the VERSALINE®, has made it a cost-efficient platform for a wide range of applications. Leading device manufacturers are using Plasma-Therm technology and systems to produce key components for diverse and well-known products, such as mobile phones, hard disk drives and LED lighting. 

Advanced plasma processing platforms

Plasma-Therm’s 790™ platform is the latest in the 790 series of cost-efficient systems. With a large worldwide install base, the 790 platform, offered in both RIE and PECVD configurations, has been field-demonstrated to have low-maintenance requirements and is easily operated in R&D through high-production environments.

Our Mask Etcher series of systems for photomask production is a cornerstone for the integrated circuit industry by exceeding technology roadmap milestones for over 15 years. A wide variety of films can be etched from entry level 250nm technology to <32nm production with ICP high-density plasma etch systems.

Committed to quality and system development

A leadership position in multiple markets is secured with more than 35 years of focus on customer support, innovation, reliability and low cost of ownership. Plasma-Therm is committed to the development of systems and services that meet the quality requirements of our customers. This commitment is backed by our 11 consecutive customer satisfaction ‘THE BEST’ awards from VLSI.

We meet the demands made by rapidly changing technology and high productivity in manufacturing environments. Demonstrated production expertise, combined with a strong presence at major research institutes and facilities, results in a large installed base, and secures Plasma-Therm’s reputation as a preferred supplier of process equipment.