Applikon Analytical - Process Analyzers for Semiconductor Wet Chemical Process Applications

Applikon Analytical has developed, manufactured and supplied on-line analytical monitoring and process control systems using electrochemical measurement for more than 25 years.

Applikon Analytical systems are available using titration, spectro / colorimetric analysis, ion selective electrodes or more complex electrochemical analysis techniques such as voltammetry and ion chromatography.

Applikon Analytical tools are a critical requirement used to "watch dog" your chemical process from bulk chemical distribution to point-of-use in the fab to wastewater treatment. On-line monitoring needs in semiconductor and microelectronics manufacturing cover a spectrum of liquid chemistries and metrologies in the wafer, ICS, MEMS / MST, DRAM, Readrite and TFT / LCD market sectors.

ON-LINE PROCESS TITRATORS AND CONCENTRATION MONITORS

Applikon have always focused on providing innovative, dependable new analyzer products and services. The modular approach of the systems makes it possible to readily customize them for each customer or application.

Applikon Analytical has set the standards for on-line wet chemical analyzers. Thousands of these analyzers perform on-line ion analysis with 99% up-times on a daily basis. High accuracy and reliability, coupled with low maintenance and ease of use, ensures increased product throughput and yields.

The following is a selection of analyzer applications.

CLEAN LINES IN WET BENCH

• Ammonium hydroxide and hydrogen peroxide in SC-1 bath
• Hydrogen peroxide and hydrochloric acid in SC-2 bath
• Hydrochloric acid or phosphoric acid in acid sump

COPPER, NICKEL, TIN AND IRON PLATING

• Copper, sulfuric acid and chloride in acid copper plating
• Nickel and hypophosphite in nickel plating
• Nickel, boric acid and chloride in nickel sulfamate plating
• Tin and sulfuric acid in stannous tin plating
• Tin, lead and free acid in tin / lead (solder) plating
• Iron, nickel in permalloy plating

WET ETCHANTS / STRIPPERS IN PHOTO ETCHING

• Hydrofluoric acid
• Mixed etchant acids (HF / HCl, HF / HNO3 / HAc, etc.)
• KOH etchant
• Hydroxylamine / water in photoresist strip solvent (polymer removal)
• Sodium hydroxide in photo resist stripper

PHOTO RESIST DEVELOPERS IN PHOTOLITHOGRAPHY

• TMAH (tetramethylammoniumhydroxide) in organic developer
• Potassium carbonate / bicarbonate / borate in developer

CHEMICAL MECHANICAL PLANARIZATION (POLISHING)

• Hydrogen peroxide in CMP slurry
• BTA as copper corrosion inhibitor
• Acid in ECP

TFT FLAT PANEL DISPLAY MANUFACTURING

• Phosphoric acid / nitric acid / acetic acid in blended acids (Al etch)
• Oxalic acid

ABOUT APPLIKON ANALYTICAL

Applikon Analytical is a member of the METROHM group. METROHM's knowledge and expertise in ion analysis in the lab is integrated in our analyzers.

Further to semiconductor applications, Applikon analyzers are used in the environmental, water, power, petro/chemical, metal, galvanic, mining, pulp and paper, textile, food, beverage, pharmaceutical and biotechnology industries.

Over the years, Applikon Analytical has built a worldwide distributor network of the highest competence. Our products are locally supported with application knowledge, installation, training, service and supply of spare parts.

For more information on our products and local distributors, visit our website below.