Sensors and Controllers
| Cosense | ||
ML-101 series - micro-measurement level sensors for wafer profile, wafer counting, alignment, flatness, thickness, position safety and robotic enabling applications. |
SE-600 series Sonic Eye non-invasive ultrasonic liquid level sensors. |
SL-700 / SL-900 series liquid level sensors for use in semiconductor fluid handling equipment. |
AD-101 series, non-invasive ultrasonic sensors to detect air bubbles / air-in-line / foam / particles in fluid as it flows through tubing. |
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