Busch Semiconductor Vacuum Group

Busch is one of the largest manufacturers of vacuum pumps in the world. With more than 45 years of experience and 56 offices in 39 countries, we are strategically positioned around the world to provide our customers with the essentials for success.

We are constantly at work developing innovative technologies that will define the vacuum world of the future. Our manufacturing plants in Germany, Switzerland, the UK, Korea and the US utilise the most modern manufacturing techniques.

Busch Semiconductor Vacuum Group

The Busch Semiconductor Vacuum Group is serving the vacuum needs of the semiconductor, solar cell and flat panel display markets with a range of products noted for their functionality, compactness, ease of use and minimal environmental impact.

Continuous investment in R&D is fundamental to the group’s remarkable success to date. This focus has resulted in the development of ‘next generation’ products, together with our advanced pump monitoring system and universal tool interface.

Fine and high vacuum repair service

Busch has more than 20 years experience in the repair and maintenance of fine and high vacuum pumps of all brands; including:

• Dry process vacuum pumps
• Two-stage rotary vane vacuum pumps
• Roots vacuum pumps
• Piston vacuum pumps
• Turbo-molecular vacuum pumps
• Cryogenic vacuum pumps
• Diffusion vacuum pumps

Spare and wear parts of all main brands are permanently in stock.

Fine and high vacuum service centers

Within the 12 dedicated fine and high vacuum service facilities around the world, situated in Europe, Asia and the US, Busch is working according to ISO 9001 and OHSAS 18001 quality requirements and processes. All service employees have permanent access to a database where all repair and maintenance processes, as well as the testing guidelines, are precisely set out and can also be called up by video at any workplace.

On-site and field service

Reliable and professional complete service management; that is what Busch can offer you, from on-site service right through to complete sub-fab management, replacements pumps and 24/7 service.

Our highly qualified and experienced Busch service technicians are here to help you achieve the best from your plants; take advantage of their specialist expertise. The extensive Busch network guarantees that you always speak to the same contact, who in turn can draw on a global network of information within the Busch Group.

Busch can offer you an individual service agreement tailored to your particular needs; from simple maintenance for one vacuum pump to an agreement regarding full responsibility for the management of all technical equipment.