Axus Technology - CMP Equipment, Post-CMP Cleaning and Wafer Grinding Equipment

Axus Technology focuses on providing leading edge equipment and process solutions for surface processing applications, including Chemical Mechanical Planarization (CMP), post-CMP cleaning equipment and wafer grinding processes. Axus Technology offers refurbished equipment, sales of spare parts and assemblies, installation and service support, process development services and equipment engineering services.

SEMICONDUCTOR AND MEMS PROCESS EQUIPMENT FOR CMP AND BACK GRINDING PROCESSES

Axus Technology delivers semiconductor and MEMS process equipment for use with CMP processes, wafer polishing, post-CMP cleaning and wafer grinding. The equipment is either new or refurbished and operates to original OEM specifications. Each tool is provided with a source inspection at our Chandler, Arizona facility, and is packaged with installation and warranty support.

Axus maintains an inventory of processing tools available, which are refurbished and configured to customer specifications.

CMP Tools:

• IPEC 472 and IPEC 372M
• IPEC 776, Orbital Polisher
• Applied Materials Mirra
• Strasbaugh 6DSSP
• Strasbaugh 6EC

Post-CMP Cleaning Tools:

• OnTrak DSS 200 - series 0, 1, and 2

Wafer Grinding Tools:

• Strasbaugh 7AF
• Strasbaugh 7AA
• Disco DFG841

Additionally, all tools can be configured to accommodate various materials, as well as various substrate shapes and sizes.

CMP TOOLS, CLEANING EQUIPMENT AND WAFER GRINDING TOOLS

Axus Technology maintains an extensive catalogue of spare parts and assemblies for the support of CMP tools, post-CMP cleaning equipment and wafer grinding tools. Many of these parts have been provided by the original equipment manufacturer.

The broad array of available parts includes various consumable parts. Parts and assemblies are new and configured specifically for use with these tools.

The technical support team at Axus is composed of engineers and technicians with extensive OEM experience. Axus offers a variety of support programs, including on-call support, service contracts and periodic maintenance programs. The Axus Technology team can also refurbish and upgrade customer tools in our Chandler, Arizona facility.

SYSTEM UPGRADES, PROCESS DEVELOPMENT, EQUIPMENT CUSTOMIZATION AND PRODUCT DEVELOPMENT SERVICES

Axus Technology offers a range of engineering services for end users and OEM customers. These services include system upgrades, process development, equipment customization, and product development services.

System Upgrades - equipment upgrades are generally initiated in order to incorporate improved technology into the existing equipment. These upgrades may also result from the obsolescence of parts or assemblies. Axus routinely provides equipment upgrade services to end users and OEM customers.

Process Development - whether it is developing a CMP process for substrate polishing or grinding a novel substrate material, Axus Technology is uniquely capable of guiding the development of a state-of-the-art process. Axus has successfully delivered new, and sometimes unique, processes to a number of customers.

Equipment Customization - Axus Technology can rapidly modify your existing tooling, or one from our inventory, to accommodate your specific process requirements. Axus can integrate a new device, or modify the tools to work with new process technologies.

Product Development - with a staff of experienced engineers and technicians, and the ability to engineer and manufacture new products, Axus has been engaged by partner companies to develop a range of new technologies. These include the development of an improved carrier technology, the development and manufacture of a novel pad conditioning system and the engineering of new material handling systems for existing tools. Axus has demonstrated the ability to rapidly and economically deliver the goods.

INDUSTRY EXPERTS YOU CAN TRUST

Axus Technology is focused on quality, technology and customer satisfaction. The Axus client list includes a number of major semiconductor fabs, national laboratories, major universities and leading-edge technology companies.

Axus Technology is an active member of SEC/N, a standards-review organization that grew out of Sematech activities. The SEC/N trade association was established as a forum for development of standards for the secondary semiconductor equipment market. Axus is pleased to be an active member company, along with major OEM and end-user companies.