Reinraumtechnik Lanz - New and Used Substrate Spinners, Mask Aligners, Evaporator / High-Vacuum Coaters and HMDS Ovens

With over 20 years of experience in this field, German-based Reinraumtechnik Lanz offers new and used front-end semiconductor manufacturing equipment to satisfied customers worldwide.

Reinraumtechnik Lanz offers both new and used semiconductor equipment, customized to meet individual requirements.

THERMAL PROCESSES AND TEMPERING SUBSTRATES - HOTPLATE HP 200

Our hotplate HP 200 is designed for various thermal processes for substrates, wafer; substrate size up to 200mm diameter, or 150mm x 150mm square. Maximum temperature is 200°C.

With vacuum holding, cover with exhaust, timer, and temperature controller. Various options include proximity with stepper motor, temperature ramping via PC, N2 flood.

DEHYDRATION AND VAPOR DISPOSITION - HMDS OVEN VPO 50

Our HMDS oven VPO 50 for dehydration and vapor deposition to generate photo resist adhesion. Temperature ranges up to 170°C; the units are PLC controlled via touch panel with four recipes and 15 steps. Standard configuration includes pump control, stainless steel oven surface, and HMDS support with refillable glass cylinder.

LITHOGRAPHY / MASK ALIGNERS, INCLUDING KARL SUSS (SUSS MICROTEC) MASK ALIGNERS

Reinraumtechnik's range of refurbished Karl Suss (Suss Microtec) mask aligners includes the MA 150, MA56, MA 45, MJB3 models. Our refurbished mask aligners are available either in standard configuration, or built to customer requirements. Various spare parts, e.g. elliptical mirrors, mask holders, chucks and new lamp power supply made by Reinraumtechnik Lanz are also available.

HIGH VACUUM COATER / SPUTTER / EVAPORATOR

Our customized, refurbished high vacuum coater / sputter / evaporator systems are designed for coating and / or sputtering wafers and substrates. Various options are available to meet exact client’s specifications, including e-guns, thermal evaporators, planetary system, ion gun, pump stand, controlling unit, power centre, etc.

SUBSTRATE SPINNER, COATER AND DEVELOPER FOR WAFER COATING AND DEVELOPING

The substrate spinner EBS 11 is designed for coating and developing substrates and wafers. Spinner modules can be used as coaters and / or developers for substrates up to 5in square and wafers up to 150mm diameter. Five programmable outputs for medias, e.g. DI-water, developer, are offered.

The substrate spinner EBS 11 is available either as a table-mounted or a stand-alone system. Additional options such as dispense arm, dispense pump, backside-rinse and media valves are also available. For larger and heavier substrates we offer our EBS8.

REFURBISHED SEMICONDUCTOR PRODUCTS

Our extensive range of refurbished semiconductor equipment focuses on:

• Evaporation and sputtering equipment, e.g. Balzers evaporation systems BAK 760, BAK 640, LLS 801, Leybold L560
• Lithograpy / mask aligners, such as Karl Suss (Suss Microtec) mask aligners MA150, MA56, MA45, MJB3
• Bonders, i.e. Kulicke & Soffa wedge and ball bonders
• Etchers, including plasma etchers
• Coater and developer, such as FSI systems, SVG and Convac coaters
• Wafer saws, e.g. Disco, Loadpoint and other dicing saws
• Heating and drying ovens
• Vacuum ovens
• Cleaning systems, e.g. rinser / dryer

Our range of newly developed semiconductor equipment offers:

• HMDS oven, VPO 50, for dehydration and vapor disposition to generate photo resist adhesion
• Expander for expanding processed dies for accurate and easy pick and placement
• Lanz Rinser / Dryer for rinsing and drying substrates / wafers
• Substrate spinner EBS 11 for wafer coating respectively developing
• Hotplate HP 200 for thermal processes and tempering substrates
• Power supply CPS 350 for different photolithography exposure applications
• Pump stand controller APS for various evaporation and sputtering processes

All of our equipment is located on our premises and is inspected and refurbished by our own qualified staff. Spare parts, worldwide service and maintenance as well as in-depth consultation round off our customer services. Because we sell primarily to end users, without a middleman, we can offer attractive prices.

Founded in 1990 by Karl Lanz, Reinraumtechnik Lanz offers both new and used semiconductor equipment and devices, customized to meet individual requirements.