Moving into the Predictive Space with Virtual Metrology18 April 2011 by Applied Materials
Metrology plays a crucial role in manufacturing. However, given its high capital equipment cost and cycle time impact on critical processes, metrology is a high-cost, high-stakes proposition. Further, issues with performance of metrology systems can lead to additional manufacturing cost and waste. These issues include lack of ability to support wafer-to-wafer metrology, delays in metrology data feedback, and lost productivity from non-optimal process control and lack of optimised metrology strategies.
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Moving into the Predictive Space with Virtual Metrology