PSG Trapping of Metal Contaminants During Belt Furnace Inline Phosphorus Diffusion in Crystalline Si Wafers14 July 2011 by BTU International
Inline wet chemical phosphorus coating and thermal diffusion in a conveyor furnace is a high-throughput alternative to the conventional batch POCl3 process.
There is now significant interest in the adoption of inline diffusion on an industrial scale in order to achieve a continuous flow, low-cost process which interfaces well with other inline processing steps.
A concern about inline diffusion in conveyor furnaces has been the potential for conveyor belts to contribute to wafer contamination.
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PSG Trapping of Metal Contaminants During Belt Furnace Inline Phosphorus Diffusion in Crystalline Si Wafers