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Immersion Imaging Under The Microscope



90nm SRAM cell showing Poly layer overlaid to Active. The former was exposed with an immersion scanner.


  • In dry lithography, the Numerical Aperture (NA) of the space between the lens...

  • The aperture angle is restricted to <ð/2 so that light can pass from the lens...

  • 90nm SRAM cell showing Poly layer overlaid to Active. The former was exposed...

  • Major suppliers have announced roadmaps for 193nm immersion scanners covering...

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