Specifications - IMEC 45nm Node Research Fab, Leuven, Belgium
| Key Data | |
|---|---|
| Organization | IMEC (Interuniversity MicroElectronics Center) |
| Location | Leuven, Belgium |
| Type of facility (technologies) | Sub 45nm CMOS research |
| Project cost | €84 million |
| Main contractor | M+W Zander (planning, design and construction) |
| Area | 2,200m² |
| Start date / completion / on-line | February 2003 / 2004 / 2005 |
| Process Details | |
| Wafer size | Wafer size |
| Feature size | 45nm CMOS and below |
| Applications | Research facility |
| Epitaxy | Various |
| Lithography | 193nm immersion, EUV |
| Etch / strip | Various |
| Diffusion / implant / metal | Various |
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