Specifications - Olympus MEMS Foundry, Nagano , Japan
| Key Data | |
|---|---|
| Organization | Olympus Corporation |
| Location | Nagano Prefecture |
| Type of facility (technologies) | Bulk micromachining MEMS processes |
| Project Details | |
| Project cost | $25 million over three years |
| Area | 2,200m² total area worldwide; the Nagano clean room has been expanded by 25% |
| Target completion | 2007 |
| No of employees | 100 |
| Process Details | |
| Wafer size | 4in, 6in and eventually 8in |
| Applications | Optical, Bio and RF MEMS and MEMS-based modules, including optical scanners, inkjet print heads, micro mirror arrays, VOAs and optical switches for optical cross connects |
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