EV Group Wafer Processing Equipment

EV Group (EVG) is a recognised technology company and a market leader for wafer processing equipment.

The company manufactures industry-leading wafer-bonding, lithography / nanoimprint lithography (NIL), metrology, photo-resistant coating, cleaning and inspection equipment.

EVG targets the advanced packaging, compound semiconductor / LED and silicon-based power devices, micro-electro-mechanical systems (MEMS), nanotechnology and silicon-on-insulator (SOI) markets.

Wafer bonding, advanced packaging and nanotechnology

EVG has set worldwide industry standards for aligned wafer bonding, as well as resist processing for the MEMS, nanotechnology and semiconductor industries. In fact, EVG holds the dominant share of the market for wafer bonding equipment and is a market and technology leader in lithography for advanced packaging and nanotechnology.

Through close collaboration with its global customers, the company implements a flexible manufacturing model to develop reliable, high-quality, low-cost-of-ownership systems that are easily integrated into customers’ fab lines.

R&D and high-volume production expertise

A long history of innovation, superior process capabilities and advanced, cost-effective production equipment, as well as quality and support, make EVG the partner of choice, both in R&D and high-volume production environments. EVG’s technological expertise and cooperative relationships with an extensive list of global partners enables customers to develop and successfully commercialise their innovations.

EVG works closely with universities, as well as industry related and independent R&D institutes, and plays a major role in numerous industry consortia. Along these lines, the company co-founded the EMC-3D consortium to create and help drive implementation of a cost-effective through-silicon via (TSV) process for 3D chip stacking and MEMS integration.

EVG also founded NILCom, a consortium of imprint lithography supply chain companies and research organisations working together to assist clients in advancing their ideas into a manufacturing environment.

Advanced process development and application labs

Founded in 1980, EVG is headquartered in St Florian, Austria, and operates via a global customer support network, with subsidiaries in Tempe, Arizona; Albany, New York; Yokohama and Fukuoka, Japan; Seoul, Korea, and Chung-Li, Taiwan.

The company’s unique triple i-approach (invent, innovate, implement) is supported by a vertical integration, allowing EVG to respond quickly to new technological developments, apply new technology to manufacturing challenges and to expedite device manufacturing at a high volume.

With state-of-the-art application labs and cleanroom facilities based at its headquarters in Austria, as well as in the US and Japan, EVG is focused on delivering superior process expertise to its growing global customer base.

In addition these advanced process development and application labs are designed to accommodate independent research work, which will explore and develop baseline processes and conduct small volume pilot line runs in order to simulate a production line process.

Make an enquiry

EV Group (EVG)

DI Erich Thallner Strasse 1

St Florian am Inn



+43 7712 5311 0 +43 7712 5311 4600 www.evgroup.com

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EV Group (EVG)

DI Erich Thallner Strasse 1

St Florian am Inn



+43 7712 5311 0 +43 7712 5311 4600 www.evgroup.com
EV Group Japan KK

Yokohama Business Park East Tower 1F

134, Godo-cho, Hodogaya-ku





+81 45 348 0665 +81 45 348 0666
EV Group Korea Ltd.

Room 302, 3rd Floor, ILJIN Building

97-4 BanPo-Dong, SeoCho-Gu



South Korea

+82 2 3218 4400 +82 2 3218 4401
EV Group Inc.

7700 South River Parkway


AZ 85284

United States of America

+1 480 305 2400 +1 480 305 2401
EV Group Inc.

255 Fuller Road

PO Box # 294


NY 12203

United States of America


10F-7, No. 400, Hwang-Pei Road



+886 3 280 5680 +886 3 280 5689