Inline wet chemical phosphorus coating and thermal diffusion in
a conveyor furnace is a high-throughput alternative to the
conventional batch POCl3 process.
There is now significant
interest in the adoption of inline diffusion on an industrial scale
in order to achieve a continuous flow, low-cost process which
interfaces well with other inline processing steps.
about inline diffusion in conveyor furnaces has been the
potential for conveyor belts to contribute to wafer
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