PSG Trapping of Metal Contaminants During Belt Furnace Inline Phosphorus Diffusion in Crystalline Si Wafers

Inline wet chemical phosphorus coating and thermal diffusion in a conveyor furnace is a high-throughput alternative to the conventional batch POCl3 process.

There is now significant interest in the adoption of inline diffusion on an industrial scale in order to achieve a continuous flow, low-cost process which interfaces well with other inline processing steps.

A concern about inline diffusion in conveyor furnaces has been the potential for conveyor belts to contribute to wafer contamination.

Please download this free white paper for more information

Download to find out more.