Immersion Imaging Under The Microscope
Major suppliers have announced roadmaps for 193nm immersion scanners covering NA = 0.85 to >1.2. Meanwhile, resist and track suppliers have developed immersion-compatible systems, and full-chip device fabrication is ongoing.
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Immersion Imaging Under The Microscope
Major suppliers have announced roadmaps for 193nm immersion scanners covering NA = 0.85 to >1.2. Meanwhile, resist and track suppliers have developed immersion-compatible systems, and full-chip device fabrication is ongoing.
Immersion Imaging Under The Microscope
Major suppliers have announced roadmaps for 193nm immersion scanners covering NA = 0.85 to >1.2. Meanwhile, resist and track suppliers have developed immersion-compatible systems, and full-chip device fabrication is ongoing.
