Semiconductor Technology is using cookies

We use them to give you the best experience. If you continue using our website, we'll assume that you are happy to receive all cookies on this website.

ContinueLearn More X
X

Immersion Imaging Under The Microscope

Major suppliers have announced roadmaps for 193nm immersion scanners covering NA = 0.85 to >1.2. Meanwhile, resist and track suppliers have developed immersion-compatible systems, and full-chip device fabrication is ongoing.



Immersion Imaging Under The Microscope

Major suppliers have announced roadmaps for 193nm immersion scanners covering NA = 0.85 to >1.2. Meanwhile, resist and track suppliers have developed immersion-compatible systems, and full-chip device fabrication is ongoing.



Immersion Imaging Under The Microscope

Major suppliers have announced roadmaps for 193nm immersion scanners covering NA = 0.85 to >1.2. Meanwhile, resist and track suppliers have developed immersion-compatible systems, and full-chip device fabrication is ongoing.



Close
Close
Close