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IMEC 45nm Node

Organization

IMEC (Interuniversity MicroElectronics Center)

Location

Leuven, Belgium

Type of facility (technologies)

Sub 45nm CMOS research

Project cost

€84 million

Main contractor

M+W Zander (planning, design and construction)

Area

2,200m²

Start date / completion / on-line

February 2003 / 2004 / 2005

Wafer size

Wafer size

Feature size

45nm CMOS and below

Applications

Research facility

Epitaxy

Various

Lithography

193nm immersion, EUV

Etch / strip

Various

Diffusion / implant / metal

Various
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Project Overview



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