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Olympus

Organization

Olympus Corporation

Location

Nagano Prefecture

Type of facility (technologies)

Bulk micromachining MEMS processes

Project cost

$25 million over three years

Area

2,200m² total area worldwide; the Nagano clean room has been expanded by 25%

Target completion

2007

No of employees

100

Wafer size

4in, 6in and eventually 8in

Applications

Optical, Bio and RF MEMS and MEMS-based modules, including optical scanners, inkjet print heads, micro mirror arrays, VOAs and optical switches for optical cross connects
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Project Overview



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