MEMS
| Memscap MEMS Wafer Fab, Bernin | ||
Memscap is now shipping from its 5,900m² wafer fab in Bernin, France, the company's European Headquarters. |
Applying a voltage to a MEMS actuator can move mirrors for optical switching. This Koji Mirror was photographed by Hiroshi Toshiyoshi, University of Tokyo. |
Sacrificial layers allow moving MEMS to incorporate moving parts, even meshing gears (Sandia). |
MEMS structures are built using thin material films, using deposition, photolitho and etching. This 2D scanner was photographed by Ming C. Wu, UCLA Electrical Engineering Dept. |
Optical components can include lenses like this ball lens (Ming C. Wu, UCLA Electrical Engineering Dept). |
Comb drives have rows of interlocking teeth (Sandia National Laboratories, SUMMiT Technologies). |
| Olympus | ||
Olympus' worldwide presence includes its Olympus-ITA site in California, USA. |
The company's foundry service can design, prototype, manufacture and package MEMS for optical networking, biotech, medical and other industries. |
Olympus is perhaps best known for its cameras. In 2003, it introduced the E-System SLR digital camera system. |
Off the shelf products include aspheric lenses for fibreoptic communications. |
Olympus' MEMS foundry offers access to micro-fabrication and micro-assembly. |
Olympus also makes versatile semiconductor inspection systems. |
| TRONIC'S Microsystems - | ||
TRONIC'S Microsystems' Crolles (France) fab produces 10,000 wafers/year. |
TRONIC'S develops and makes high end custom MEMS and microsystems (geophones for Serco, for example) in low to medium unit volumes. |
Equipment was upgraded from 100mm to 150mm at Crolles for the end of 2004. |
Total equipment investment was €4.5 million. |
The existing facility is now equipped with a €2 million clean room, quadrupling production capacity. |
TRONIC'S produces custom MEMS using thick SOI surface and high aspect ratio micromachining. |
The company has developed an optical wafer level package dedicated to optical micro-mirrors arrays. |
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